au.\*:("LIANG, Huaqi")
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The Exploration of Laser Ablation Combined with Chemical Flow EtchingYUAN, Genfu; YAO, Yansheng; MA, Yuping et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7515, issn 0277-786X, isbn 978-0-8194-7904-4 0-8194-7904-7, 1Vol, 75150R.1-75150R.6Conference Paper
